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Fully automatic PECVD
Functional layout
Overall effect chart
1、Products overview
Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.
1.1The main function
Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.
1.2asic components
Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.
The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision.
2、Technical parameters
Low PECVD graphite boat technique on the plane is embellish technology independent research and development of photovoltaic solar cells PECVD coating production line fully automatic technique loading unloading of form a complete set of automation equipment.
1.1The main function
Low integration system, suitable for silicon solar cell production in the tubular PECVD graphite boat technique of automatic loading and unloading.
Low graphite boat and boat means has: manual lift boat, graphite boat automatic handling car boat two up and down.
1.2asic components
Low PECVD graphite boat loading and unloading machine PE - 3800 technique using staubli TX90L intelligent six axes linkage robot world leading technology, automatic basket basket system automatically, automatic collection stack coated silicon.
The machine adopts European standard steel frame structure, transparent organic glass shield; At the bottom of the frame adopts steel structure welding surface anti-corrosion treatment, with robust stability is high, staubli TX90L intelligent robot installation using reinforced independent fixed frame, to ensure the stable precision.
2、Technical parameters
|
設備名稱 Device name |
PECVD石墨舟裝卸片機 PECVD graphite boat loading and unloading machine technique |
|
型号規格 Specifications |
PE-3800 |
|
适用(yòng)石墨舟 Apply the graphite boat |
CT-21-240改造 CT-21-240transform |
|
工位數量 Location number |
兩個(gè)石墨舟工位分(fēn)别爲A石墨舟工位B石墨舟工位 Two graphite boat station is A graphite boat station B graphite boat station respectively |
|
換盒傳送 In box transfer |
伺服定位，自動換盒，更換片盒時(shí)設備不停機， Servo positioning, automatic switch box, replacing disc devices do not stop， |
|
矽片上、下(xià)料方式 Silicon wafers, blanking mode |
上料方式：50/62/100片花籃上料；下(xià)料方式：堆疊收集 Feeding way: 50/62/100 slice of flower basket; Blanking: stacked collection |
|
産能 Capacity |
3800片/小時(shí)（備注：21片石墨舟）以此爲準 3800 pieces per hour (note: 21 pieces of graphite boat) to shall prevail |
|
壓縮空氣 Compressed air |
壓力：≥0.6Mpa pressure：≥0.6Mpa |
|
運行時(shí)間 Uptime |
>98% |
|
電源 Power |
AC380V（單相三線制）/50Hz AC380V（Single-phase three-wire system）/50Hz |
|
整機功率 Engine power |
6KW |
|
執行系統 Perform system |
史陶比爾TX90L智能機器人(rén) Staubli TX90L intelligent robot |